Invention Grant
- Patent Title: Sputtering target having RFID information
-
Application No.: US15877430Application Date: 2018-01-23
-
Publication No.: US10896812B2Publication Date: 2021-01-19
- Inventor: Michael V. Pasquariello , Thomas P. St. Vincent , Matthew T. Willson , Richard J. Koba
- Applicant: MATERION CORPORATION
- Applicant Address: US OH Mayfield Heights
- Assignee: MATERION CORPORATION
- Current Assignee: MATERION CORPORATION
- Current Assignee Address: US OH Mayfield Heights
- Agency: Cozen O'Connor
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/34 ; H01J37/32 ; G06K19/077
Abstract:
A method for affixing an RFID tag to sputtering targets is disclosed. A cavity is formed on the back of the backing plate adjacent to the outer edge. Within the cavity, an RFID tag is secured with an encapsulant. The encapsulant is cured with the RFID tag capable of communicating with an associated reader through the encapsulant.
Public/Granted literature
- US20180211825A1 SPUTTERING TARGET HAVING RFID INFORMATION Public/Granted day:2018-07-26
Information query
IPC分类:
