公开(公告)号：US10896812B2

公开(公告)日：2021-01-19

申请号：US15877430

申请日：2018-01-23

Applicant: MATERION CORPORATION

Inventor： Michael V. Pasquariello ,  Thomas P. St. Vincent ,  Matthew T. Willson ,  Richard J. Koba

IPC: C23C14/34 ,  H01J37/34 ,  H01J37/32 ,  G06K19/077

Abstract: A method for affixing an RFID tag to sputtering targets is disclosed. A cavity is formed on the back of the backing plate adjacent to the outer edge. Within the cavity, an RFID tag is secured with an encapsulant. The encapsulant is cured with the RFID tag capable of communicating with an associated reader through the encapsulant.

公开(公告)号：US20180211825A1

公开(公告)日：2018-07-26

申请号：US15877430

申请日：2018-01-23

Applicant: MATERION CORPORATION

Inventor： Michael V. Pasquariello ,  Thomas P. St. Vincent ,  Matthew T. Willson ,  Richard J. Koba

IPC: H01J37/34 ,  H01J37/32 ,  C23C14/34 ,  G06K19/077

CPC classification number: H01J37/3405 ,  C23C14/3407 ,  G06K19/07749 ,  G06K19/07758 ,  G06K19/07773 ,  H01J37/32935 ,  H01J37/3417 ,  H01J37/3435 ,  H01J37/3476 ,  H01J37/3491

Abstract: A method for affixing an RFID tag to sputtering targets is disclosed. A cavity is formed on the back of the backing plate adjacent to the outer edge. Within the cavity, an RFID tag is secured with an encapsulant. The encapsulant is cured with the RFID tag capable of communicating with an associated reader through the encapsulant.