Invention Grant
- Patent Title: Integrated circuit saw bow break point
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Application No.: US16444322Application Date: 2019-06-18
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Publication No.: US10896878B2Publication Date: 2021-01-19
- Inventor: Antonius Hendrikus Jozef Kamphuis , Johannes Cobussen , Christian Zenz , Guido Albermann
- Applicant: NXP B.V.
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Agent Charlene R. Jacobsen
- Main IPC: H01L23/544
- IPC: H01L23/544 ; H01L21/78 ; H01L23/58 ; H01L23/52 ; H01L21/66 ; H01L21/304

Abstract:
A saw bow is provided and designed such that the conductors of the saw bow will break at a predictable location when using modern dicing techniques. This results in a break in the circuit provided by the saw bow, with any exposed conductors not being on the die side. Further, by providing a known breaking point in the saw bow, modern dicing techniques such as plasma dicing can be used, thereby allowing for the saw lane to be made narrower, which will in turn increase the number of wafers that can be included on a wafer.
Information query
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