- 专利标题: Semiconductor process transport apparatus comprising an adapter pendant
-
申请号: US16029320申请日: 2018-07-06
-
公开(公告)号: US10903107B2公开(公告)日: 2021-01-26
- 发明人: Dana L. Atwood , Jairo Moura
- 申请人: Brooks Automation, inc.
- 申请人地址: US MA Chelmsford
- 专利权人: Brooks Automation, inc.
- 当前专利权人: Brooks Automation, inc.
- 当前专利权人地址: US MA Chelmsford
- 代理机构: Perman & Green, LLP
- 代理商 Colin C. Durham
- 主分类号: G05B15/00
- IPC分类号: G05B15/00 ; H01L21/687 ; H01L21/677 ; G05B19/421 ; H01L21/67 ; B25J9/16 ; G05B19/042
摘要:
A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.
公开/授权文献
- US20190019719A1 TRANSPORT APPARATUS AND ADAPTER PENDANT 公开/授权日:2019-01-17
信息查询