Invention Grant
- Patent Title: Method and optoelectronic structure providing polysilicon photonic devices with different optical properties in different regions
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Application No.: US16384037Application Date: 2019-04-15
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Publication No.: US10903377B2Publication Date: 2021-01-26
- Inventor: Roy Meade , Karan Mehta , Efraim Megged , Jason Orcutt , Milos Popovic , Rajeev Ram , Jeffrey Shainline , Zvi Sternberg , Vladimir Stojanovic , Ofer Tehar-Zahav
- Applicant: Micron Technology, Inc. , Massachusetts Institute of Technology
- Applicant Address: US ID Boise; US MA Cambridge
- Assignee: Micron Technology, Inc.,Massachusetts Institute of Technology
- Current Assignee: Micron Technology, Inc.,Massachusetts Institute of Technology
- Current Assignee Address: US ID Boise; US MA Cambridge
- Agency: Perkins Coie LLP
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; H01L31/18 ; H01L31/0368 ; H01L27/144
Abstract:
Method and structural embodiments are described which provide an integrated structure using polysilicon material having different optical properties in different regions of the structure.
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