- 专利标题: MTJ containing device with replacement top electrode
-
申请号: US16266249申请日: 2019-02-04
-
公开(公告)号: US10903417B2公开(公告)日: 2021-01-26
- 发明人: Pouya Hashemi , Alexander Reznicek , Nathan P. Marchack , Bruce B. Doris
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P C.
- 代理商 Daniel P. Morris, Esq.
- 主分类号: H01L43/12
- IPC分类号: H01L43/12 ; H01L43/02 ; H01L27/22
摘要:
A method of forming a magnetic tunnel junction (MTJ) containing device is provided in which a patterned sacrificial material is present atop a MTJ pillar that is located on a bottom electrode. A passivation material liner and a dielectric material portion laterally surround the MTJ pillar and the patterned sacrificial material. The patterned sacrificial material is removed from above the MTJ pillar and replaced with a top electrode. A seam is present in the top electrode. The method mitigates the possibility of depositing resputtered conductive metal particles on a sidewall of the MTJ pillar. Thus, improved device performance, in terms of a reduction in failure mode, can be obtained.
公开/授权文献
- US20200251652A1 MTJ CONTAINING DEVICE WITH REPLACEMENT TOP ELECTRODE 公开/授权日:2020-08-06
信息查询
IPC分类: