Invention Grant
- Patent Title: Heater pedestal assembly for wide range temperature control
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Application No.: US15703666Application Date: 2017-09-13
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Publication No.: US10910238B2Publication Date: 2021-02-02
- Inventor: Kaushik Alayavalli , Ajit Balakrishna , Sanjeev Baluja , Amit Kumar Bansal , Matthew James Busche , Juan Carlos Rocha-Alvarez , Swaminathan T. Srinivasan , Tejas Ulavi , Jianhua Zhou
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687

Abstract:
Implementations of the disclosure generally relate to a semiconductor processing chamber and, more specifically, a heated support pedestal for a semiconductor processing chamber. In one implementation, a pedestal assembly is disclosed and includes a substrate support comprising a dielectric material and having a support surface for receiving a substrate, a resistive heater encapsulated within the substrate support, a hollow shaft coupled to a support member of the substrate support at a first end of the shaft, and a thermally conductive material disposed at an interface between the support member and the first end of the shaft.
Public/Granted literature
- US20180082866A1 HEATER PEDESTAL ASSEMBLY FOR WIDE RANGE TEMPERATURE CONTROL Public/Granted day:2018-03-22
Information query
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