- 专利标题: Apparatus for direct transfer of semiconductor device die
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申请号: US16792045申请日: 2020-02-14
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公开(公告)号: US10910354B2公开(公告)日: 2021-02-02
- 发明人: Cody Peterson , Clinton Adams , Sean Kupcow , Andrew Huska
- 申请人: Rohinni, LLC
- 申请人地址: US ID Coeur d'Alene
- 专利权人: Rohinni, LLC
- 当前专利权人: Rohinni, LLC
- 当前专利权人地址: US ID Coeur d'Alene
- 代理机构: Lee & Hayes, P.C.
- 主分类号: H01L25/075
- IPC分类号: H01L25/075 ; H01L21/683 ; H01L23/544 ; H01L23/00 ; H01L21/48 ; H01L21/677 ; H01L21/68 ; H01L21/687 ; H01L21/66 ; H01L21/67 ; H01L33/62 ; G02F1/13357 ; H01L23/532
摘要:
A semiconductor device die transfer apparatus includes a first frame to hold a wafer tape having a plurality of semiconductor device die disposed on a side of the wafer tape and a second frame to secure a product substrate having a circuit trace thereon. The second frame is configured to secure the product substrate such that the circuit trace is disposed facing the plurality of semiconductor device die on the wafer tape. Additionally, a rotary transfer collet is disposed between the wafer tape and the product substrate. The rotary transfer collet has a rotational axis allowing rotation from a first position facing the wafer tape to pick a die of the plurality of semiconductor device die to a second position facing the circuit trace on the product substrate to release the die, thereby applying the die directly on the product substrate during a transfer operation.
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