Invention Grant
- Patent Title: Apparatus and method for ignition of a plasma system and for monitoring health of the plasma system
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Application No.: US16682693Application Date: 2019-11-13
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Publication No.: US10910798B2Publication Date: 2021-02-02
- Inventor: Atul Gupta , Colin Sanford , Joshua Lamontagne , Kevin Wenzel
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Burns & Levinson, LLP
- Agent Joseph M. Maraia; Steven M. Mills
- Main IPC: H01T23/00
- IPC: H01T23/00 ; B08B9/032 ; H01J37/32

Abstract:
An apparatus and method for determining the health of a plasma system by igniting a plasma within a plasma confining volume generate an ignition signal with an ignition circuit and apply the ignition signal between a biased region and a grounded region in the vicinity of the plasma confining volume. A parameter in the ignition circuit is sensed, and the sensed parameter is compared to a first parameter threshold. A condition associated with the plasma confining volume is determined if the sensed parameter differs from the first voltage threshold, and a corrective action can be taken.
Public/Granted literature
- US20200099199A1 APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITORING HEALTH OF THE PLASMA SYSTEM Public/Granted day:2020-03-26
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