Invention Grant
- Patent Title: Manufacturing of integrated circuit resonator
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Application No.: US16903116Application Date: 2020-06-16
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Publication No.: US10913655B2Publication Date: 2021-02-09
- Inventor: Pavan Gupta , Aaron Partridge , Markus Lutz
- Applicant: SiTime Corporation
- Applicant Address: US CA Santa Clara
- Assignee: SiTime Corporation
- Current Assignee: SiTime Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: B81B7/00
- IPC: B81B7/00 ; H01L41/113 ; H01L23/34 ; H01L23/498 ; B81C1/00 ; H01L23/31

Abstract:
A low-profile packaging structure for a microelectromechanical-system (MEMS) resonator system includes an electrical lead having internal and external electrical contact surfaces at respective first and second heights within a cross-sectional profile of the packaging structure and a die-mounting surface at an intermediate height between the first and second heights. A resonator-control chip is mounted to the die-mounting surface of the electrical lead such that at least a portion of the resonator-control chip is disposed between the first and second heights and wire-bonded to the internal electrical contact surface of the electrical lead. A MEMS resonator chip is mounted to the resonator-control chip in a stacked die configuration and the MEMS resonator chip, resonator-control chip and internal electrical contact and die-mounting surfaces of the electrical lead are enclosed within a package enclosure that exposes the external electrical contact surface of the electrical lead at an external surface of the packaging structure.
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