- Patent Title: System, method and computer program product for classifying defects
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Application No.: US15933306Application Date: 2018-03-22
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Publication No.: US10921334B2Publication Date: 2021-02-16
- Inventor: Kirill Savchenko , Assaf Asbag , Boaz Cohen
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Revohot
- Assignee: Applied Materials Israel Ltd.
- Current Assignee: Applied Materials Israel Ltd.
- Current Assignee Address: IL Revohot
- Agency: Lowenstein Sandler LLP
- Main IPC: G01N35/00
- IPC: G01N35/00 ; G06N20/00

Abstract:
An examination system, a method of obtaining a training set for a classifier, and a non-transitory computer readable medium, the method comprising: upon receiving in a memory device object inspection results comprising data indicative of potential defects, each potential defect of the potential defects associated with a multiplicity of attribute values defining a location of the potential defect in an attribute space: sampling by the processor a first set of defects from the potential defects, wherein the defects within the first set are dispersed independently of a density of the potential defects in the attribute space; and obtaining by the processor a training defect sample set comprising the first set of defects and data or parameters representative of the density of the potential defects in the attribute space.
Public/Granted literature
- US20190293669A1 SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR CLASSIFYING DEFECTS Public/Granted day:2019-09-26
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