公开(公告)号：US11037286B2

公开(公告)日：2021-06-15

申请号：US15719447

申请日：2017-09-28

Applicant: Applied Materials Israel Ltd.

Inventor： Assaf Asbag ,  Ohad Shaubi ,  Kirill Savchenko ,  Shiran Gan-Or ,  Boaz Cohen ,  Zeev Zohar

IPC: G06K9/00 ,  G06T7/00 ,  G06K9/62 ,  G06K9/03

Abstract: There are provided a classifier and a method of classifying defects in a semiconductor specimen. The classifier enables assigning each class to a classification group among three or more classification groups with different priorities. Classifier further enables setting purity, accuracy and/or extraction requirements separately for each class, and optimizing the classification results in accordance with per-class requirements. During training, the classifier is configured to generate a classification rule enabling the highest possible contribution of automated classification while meeting per-class quality requirements defined for each class.

公开(公告)号：US10921334B2

公开(公告)日：2021-02-16

申请号：US15933306

申请日：2018-03-22

Applicant: Applied Materials Israel Ltd.

Inventor： Kirill Savchenko ,  Assaf Asbag ,  Boaz Cohen

IPC: G01N35/00 ,  G06N20/00

Abstract: An examination system, a method of obtaining a training set for a classifier, and a non-transitory computer readable medium, the method comprising: upon receiving in a memory device object inspection results comprising data indicative of potential defects, each potential defect of the potential defects associated with a multiplicity of attribute values defining a location of the potential defect in an attribute space: sampling by the processor a first set of defects from the potential defects, wherein the defects within the first set are dispersed independently of a density of the potential defects in the attribute space; and obtaining by the processor a training defect sample set comprising the first set of defects and data or parameters representative of the density of the potential defects in the attribute space.