Invention Grant
- Patent Title: Developing method, computer-readable storage medium and developing apparatus
-
Application No.: US16560137Application Date: 2019-09-04
-
Publication No.: US10921713B2Publication Date: 2021-02-16
- Inventor: Koshi Muta , Hideharu Kyoda , Minoru Kubota
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JP2014-243139 20141201,JP2015-212830 20151029
- Main IPC: G03F7/30
- IPC: G03F7/30 ; B05D1/00 ; B05C11/08 ; H01L21/67

Abstract:
A developing method includes: forming a liquid pool of a diluted developing solution diluted with pure water in a central portion of a substrate; forming a liquid film of the diluted developing solution on a surface of the substrate by accelerating rotation of the substrate to diffuse the liquid pool of the diluted developing solution on the entire surface of the substrate; and then supplying a developing solution onto the substrate. Supplying a developing solution includes: supplying the developing solution from a developing solution supply nozzle having a liquid contact surface while securing a gap having a predetermined size between the developing solution supply nozzle and the substrate; and moving the developing solution supply nozzle in a radial direction passing through a center of the substrate while forming a liquid pool of the developing solution between the substrate and the liquid contact surface of the developing solution supply nozzle.
Public/Granted literature
- US20190391496A1 Developing Method, Computer-Readable Storage Medium and Developing Apparatus Public/Granted day:2019-12-26
Information query
IPC分类: