Invention Grant
- Patent Title: Magnetic lens and exciting current control method
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Application No.: US15740291Application Date: 2017-09-05
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Publication No.: US10923312B2Publication Date: 2021-02-16
- Inventor: Wei He , Shuai Li
- Applicant: Focus-eBeam Technology (Beijing) Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: Focus-eBeam Technology (Beijing) Co., Ltd.
- Current Assignee: Focus-eBeam Technology (Beijing) Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Syncoda LLC
- Agent Feng Ma
- Priority: CN201611152870.6 20161214
- International Application: PCT/CN2017/100465 WO 20170905
- International Announcement: WO2018/107823 WO 20180621
- Main IPC: H01J37/141
- IPC: H01J37/141 ; H01J37/24 ; H01J37/26

Abstract:
A magnetic lens is disclosed, which includes: a magnetic yoke, an exciting coil and a power supply controlling system. The magnetic yoke is at outside of the exciting coil and surrounds the coil; the exciting coil is made up of litz wires; the power supply controlling system is arranged to supply power to the exciting coil and control the flow directions and magnitudes of the currents in the exciting coil. A method for controlling the magnetic lens is also disclosed.
Public/Granted literature
- US20190295808A1 MAGNETIC LENS AND EXCITING CURRENT CONTROL METHOD Public/Granted day:2019-09-26
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