Invention Grant
- Patent Title: Substrate solution-treatment apparatus, treatment solution supplying method and storage medium
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Application No.: US15989744Application Date: 2018-05-25
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Publication No.: US10937669B2Publication Date: 2021-03-02
- Inventor: Kosuke Fukuda , Mikio Nakashima , Kazuyoshi Shinohara , Hiroyuki Higashi
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JPJP2017-108689 20170531
- Main IPC: H01L21/67
- IPC: H01L21/67

Abstract:
A substrate solution-treatment apparatus includes: a substrate holding part for holding a substrate; a nozzle for supplying a treatment solution onto the substrate; a supply line; a flow rate control mechanism including a flow rate meter and a flow rate control valve installed in the supply line; an opening/closing valve installed in the supply line; and a control part for controlling operations of the flow rate control mechanism and the opening/closing valve. The flow rate control mechanism controls the flow rate control valve such that a detection value of the flow rate meter coincides with a flow rate target value provided from the control part. The control part controls the nozzle to supply the treatment solution onto the substrate with the opening/closing valve opened, and provides a first flow rate as the flow rate target value to the flow rate control mechanism.
Public/Granted literature
- US20180350636A1 SUBSTRATE SOLUTION-TREATMENT APPARATUS, TREATMENT SOLUTION SUPPLYING METHOD AND STORAGE MEDIUM Public/Granted day:2018-12-06
Information query
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