Invention Grant
- Patent Title: Method of producing an optical sensor at wafer-level and optical sensor
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Application No.: US16316724Application Date: 2017-08-08
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Publication No.: US10943936B2Publication Date: 2021-03-09
- Inventor: Gregor Toschkoff , Thomas Bodner , Franz Schrank
- Applicant: ams AG
- Applicant Address: AT Premstätten
- Assignee: ams AG
- Current Assignee: ams AG
- Current Assignee Address: AT Premstätten
- Agency: MH2 Technology Law Group LLP
- Priority: EP16183205 20160808
- International Application: PCT/EP2017/070094 WO 20170808
- International Announcement: WO2018/029204 WO 20180215
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/0203

Abstract:
A method is proposed to produce an optical sensor at wafer-level, the methods comprises the following steps. A wafer is provided and has a main top surface and a main back surface. At or near the top surface of the wafer at least one integrated circuit is arranged having a light sensitive component. A first mold tool is placed over the at least one integrated circuit such that at least one channel remains between the first mold tool and the top surface to enter a first mold material. A first mold structure is formed by wafer-level molding the first mold material via the at least one channel. The first mold material creates at least one runner structure. A second mold tool is placed over the first mold structure and a second mold structure is formed by wafer-level molding a second mold material by means of the second mold tool. A light path blocking structure is arranged on the top surface to block light from entering via the at least one runner structure.
Public/Granted literature
- US20190165020A1 METHOD OF PRODUCING AN OPTICAL SENSOR AT WAFER-LEVEL AND OPTICAL SENSOR Public/Granted day:2019-05-30
Information query
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