Invention Grant
- Patent Title: Electrode design and low-cost fabrication method for assembling and actuation of miniature motors with ultrahigh and uniform speed
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Application No.: US15509782Application Date: 2015-09-09
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Publication No.: US10944339B2Publication Date: 2021-03-09
- Inventor: Donglei Fan , Kwanoh Kim , Jianhe Guo
- Applicant: BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
- Applicant Address: US TX Austin
- Assignee: BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
- Current Assignee: BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
- Current Assignee Address: US TX Austin
- Agency: Meunier Carlin & Curfman LLC
- International Application: PCT/US2015/049129 WO 20150909
- International Announcement: WO2016/040443 WO 20160317
- Main IPC: H02N1/00
- IPC: H02N1/00 ; C23C14/16 ; C23C14/58 ; H01F41/02 ; C23C14/30 ; C23C14/04 ; B81B5/00 ; B82B1/00 ; C23C14/00 ; C23C14/02 ; H01F1/01 ; H01F7/02

Abstract:
The invention includes miniature dots, miniature disks or miniature cylinders and methods of making the same by dispersing a particle in or on a dissolvable, meltable or etchable layer on a substrate, a portion of the particle exposed above a surface of the dissolvable, meltable or etchable layer; depositing a mask on the particles and the dissolvable substrate; removing the particles from the layer; etching an array of nanoholes in the substrate; depositing one or more metallic layers into the nanoholes to form an array of dots, disks or cylinders; and dissolving the dissolvable layer with a solvent to expose the dots, disks or cylinders. The dots, disks or cylinders can be included with two sets of microelectrodes for ultrahigh speed rotation of miniature motors, and/or can be designed with a magnetic configuration into miniature motors for uniform rotation speeds and prescribed angular displacement. The invention also includes modified diatom frustules, and miniature motors containing modified diatom frustules.
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