Invention Grant
- Patent Title: Method of examination of a specimen and system thereof
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Application No.: US16250832Application Date: 2019-01-17
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Publication No.: US10957034B2Publication Date: 2021-03-23
- Inventor: Elad Cohen , Shahar Arad
- Applicant: APPLIED MATERIALS ISRAEL LTD.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G06T5/00 ; G06T5/50

Abstract:
There are provided a system and method of examination on a specimen, the method comprising: obtaining an inspection image of a die and generating a defect map using one or more reference images; selecting a plurality of defect candidates from the defect map; and generating for each defect candidate, a respective modified inspection image patch, comprising: extracting an image patch surrounding the defect candidate respectively from the inspection image and each reference image; and modifying the inspection image patch, comprising: estimating noise representative of intensity variations on the inspection image patch, the noise including a first type of noise representative of a polynomial relation between the inspection and reference image patches, and a second type of noise representative of a spatial anomaly in the inspection image patch, and removing at least one of the first and second types of noise from the inspection image patch based on the estimated noise.
Public/Granted literature
- US20200234417A1 METHOD OF EXAMINATION OF A SPECIMEN AND SYSTEM THEREOF Public/Granted day:2020-07-23
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