公开(公告)号：US10902582B2

公开(公告)日：2021-01-26

申请号：US16250980

申请日：2019-01-17

Applicant: Applied Materials Israel, Ltd.

Inventor： Haim Feldman ,  Eyal Neistein ,  Harel Ilan ,  Shahar Arad ,  Ido Almog

IPC: G06T7/00 ,  G06T7/11

Abstract: A method, system and computer readable medium for providing information about a region of a sample. The method includes (i) obtaining, by an imager, multiple images of the region; wherein the multiple images differ from each other by at least one parameter (ii) receiving or generating multiple reference images; (iii) generating multiple difference images that represent differences between the multiple images and the multiple reference images; (iv) calculating a set of region pixel attributes, (v) calculating a set of noise attributes, based on multiple sets of region pixels attributes of the multiple region pixels; and (vi) determining for each region pixel, whether the region pixel represents a defect based on a relationship between the set of noise attributes and the set of region pixel attributes of the pixel.

公开(公告)号：US11815470B2

公开(公告)日：2023-11-14

申请号：US17010746

申请日：2020-09-02

Applicant: Applied Materials Israel, Ltd.

Inventor： Haim Feldman ,  Eyal Neistein ,  Harel Ilan ,  Shahar Arad ,  Ido Almog ,  Ori Golani

IPC: G06K9/00 ,  G01N21/95 ,  G06T7/00

CPC classification number: G01N21/9505 ,  G06T7/001 ,  G06T7/0008 ,  G06T2207/30148

Abstract: Disclosed herein is a method for detecting defects on a sample. The method includes obtaining scan data of a region of a sample in a multiplicity of perspectives, and performing an integrated analysis of the obtained scan data. The integrated analysis includes computing, based on the obtained scan data, and/or estimating cross-perspective covariances, and determining presence of defects in the region, taking into account the cross-perspective covariances.

公开(公告)号：US10957034B2

公开(公告)日：2021-03-23

申请号：US16250832

申请日：2019-01-17

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Elad Cohen ,  Shahar Arad

IPC: G06T7/00 ,  G06T5/00 ,  G06T5/50

Abstract: There are provided a system and method of examination on a specimen, the method comprising: obtaining an inspection image of a die and generating a defect map using one or more reference images; selecting a plurality of defect candidates from the defect map; and generating for each defect candidate, a respective modified inspection image patch, comprising: extracting an image patch surrounding the defect candidate respectively from the inspection image and each reference image; and modifying the inspection image patch, comprising: estimating noise representative of intensity variations on the inspection image patch, the noise including a first type of noise representative of a polynomial relation between the inspection and reference image patches, and a second type of noise representative of a spatial anomaly in the inspection image patch, and removing at least one of the first and second types of noise from the inspection image patch based on the estimated noise.