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公开(公告)号：US11107207B2
公开(公告)日：2021-08-31
申请号：US16533737
申请日：2019-08-06
发明人： Elad Cohen , Yuri Feigin , Lior Katz , Eyal Neistein
摘要： A method and system for detecting defects in a specimen, the method comprising: obtaining an image comprising a plurality of pixels of a specimen part; processing the image according to a detection recipe to derive information related to potential defects in the specimen, the information comprising a first data set informative of first locations identified, in accordance with the detection recipe as locations of potential defects, and a second data set informative of second locations not identified as locations of potential defects; receiving data specifying targeted locations of interest within the part of the specimen; when the first data set is not informative of each targeted location, generating a third data set by adding to the first data set information related to the missing targeted location from the second data set, the information bearing an indication that it corresponds to a targeted location; and outputting the third data set.
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公开(公告)号：US10460434B2
公开(公告)日：2019-10-29
申请号：US15683726
申请日：2017-08-22
发明人： Limor Martin , Elad Cohen , Eyal Neistein , Moshe Amzaleg
IPC分类号： G06T7/00 , G06T5/00 , H01L21/67 , G01N21/956 , H01L21/66
摘要： There are provided system and method of detecting defects on a specimen, the method comprising: capturing a first image from a first die and obtaining one or more second images; receiving: i) a first set of predefined first descriptors each representing a type of DOI, and ii) a second set of predefined second descriptors each representing a type of noise; generating at least one difference image based on difference between pixel values of the first image and pixel values derived from the second images; generating at least one third image, comprising: computing a value for each given pixel of at least part of the at least one difference image based on the first and second sets of predefined descriptors, and surrounding pixels centered around the given pixel; and determining presence of defect candidates based on the at least one third image and a predefined threshold.
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公开(公告)号：US11386539B2
公开(公告)日：2022-07-12
申请号：US16425859
申请日：2019-05-29
发明人： Elad Cohen , Yuri Feigin , Lior Katz , Eyal Neistein
摘要： A system and method for specimen examination, the system comprising a processing and memory circuitry (PMC) for: obtaining an image of at least a part of a specimen, the image acquired by an examination tool; receiving one or more characteristics of a defect of interest and a location of interest associated therewith; modifying within the image one or more pixels corresponding to the location of interest, wherein the modification is provided in accordance with a characteristic of the defect of interest, thereby planting the defect of interest into the image; processing the modified image to detect locations of potential defects of the specimen in accordance with a detection recipe; and determining whether the detected locations include the location of interest. Subject to the location of interest not being detected, modifying the detection recipe to enable detecting the planted defect of interest at the location of interest.
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公开(公告)号：US10957034B2
公开(公告)日：2021-03-23
申请号：US16250832
申请日：2019-01-17
发明人： Elad Cohen , Shahar Arad
摘要： There are provided a system and method of examination on a specimen, the method comprising: obtaining an inspection image of a die and generating a defect map using one or more reference images; selecting a plurality of defect candidates from the defect map; and generating for each defect candidate, a respective modified inspection image patch, comprising: extracting an image patch surrounding the defect candidate respectively from the inspection image and each reference image; and modifying the inspection image patch, comprising: estimating noise representative of intensity variations on the inspection image patch, the noise including a first type of noise representative of a polynomial relation between the inspection and reference image patches, and a second type of noise representative of a spatial anomaly in the inspection image patch, and removing at least one of the first and second types of noise from the inspection image patch based on the estimated noise.
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公开(公告)号：US10290087B2
公开(公告)日：2019-05-14
申请号：US15701371
申请日：2017-09-11
发明人： Ariel Shkalim , Moshe Amzaleg , Eyal Neistein , Shlomo Tubul , Mark Geshel , Elad Cohen
摘要： There are provided system and method of generating an examination recipe usable for examining a specimen, the method comprising: capturing images from dies and obtaining noise map indicative of noise distribution on the images; receiving design data representative of a plurality of design groups each having the same design pattern; calculating a group score for each given design group, the group score calculated based on the noise data associated with the given design group and a defect budget allocated for area of the given design group; providing segmentation related to the dies, comprising: associating design groups with segmentation labels indicative of different noise levels based on the group score, thereby obtaining a set of die segments each corresponding to one or more design groups associated with the same segmentation label and segmentation configuration data; and generating an examination recipe using the segmentation configuration data.
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