An electrostatic chuck device includes: in order, an electrostatic chuck part having one principal surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in internal electrode for electrostatic attraction; a heating member bonded to a surface on the side opposite to the placing surface of the electrostatic chuck part in a pattern having gaps; a sheet material; and a base part having a function of cooling the electrostatic chuck part, in which a silicone resin sheet having a layer thickness of 10 μm or more and less than 200 μm and a Shore hardness (A) in a range of 10 to 70 is provided between the electrostatic chuck part and the heating member.