Invention Grant
- Patent Title: Method and system for providing ultrapure water with flexible lamp configuration
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Application No.: US15571266Application Date: 2016-05-04
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Publication No.: US10961143B2Publication Date: 2021-03-30
- Inventor: Christopher Hall , Bruce Lee Coulter
- Applicant: Evoqua Water Technologies LLC
- Applicant Address: US MA Lowell
- Assignee: Evoqua Water Technologies LLC
- Current Assignee: Evoqua Water Technologies LLC
- Current Assignee Address: US MA Lowell
- International Application: PCT/US2016/030708 WO 20160504
- International Announcement: WO2016/179241 WO 20161110
- Main IPC: C02F9/00
- IPC: C02F9/00 ; C02F1/32 ; C02F1/20 ; C02F1/42 ; C02F1/44 ; C02F1/469 ; C02F1/70 ; C02F1/72 ; C02F103/04 ; C02F1/04 ; C02F1/00 ; C02F103/34
Abstract:
A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate a continuously variable intensity of the actinic radiation.
Public/Granted literature
- US20180273412A1 Method and System for Providing Ultrapure Water With Flexible Lamp Configuration Public/Granted day:2018-09-27
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