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公开(公告)号：US20230312386A1
公开(公告)日：2023-10-05
申请号：US18205689
申请日：2023-06-05
摘要： A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate a continuously variable intensity of the actinic radiation.
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公开(公告)号：US10961143B2
公开(公告)日：2021-03-30
申请号：US15571266
申请日：2016-05-04
IPC分类号： C02F9/00 , C02F1/32 , C02F1/20 , C02F1/42 , C02F1/44 , C02F1/469 , C02F1/70 , C02F1/72 , C02F103/04 , C02F1/04 , C02F1/00 , C02F103/34
摘要： A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate a continuously variable intensity of the actinic radiation.
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公开(公告)号：US11697607B2
公开(公告)日：2023-07-11
申请号：US17199092
申请日：2021-03-11
IPC分类号： C02F9/00 , C02F1/32 , C02F1/20 , C02F1/42 , C02F1/44 , C02F1/469 , C02F1/70 , C02F1/72 , C02F103/04 , C02F1/04 , C02F1/00 , C02F103/34
CPC分类号： C02F9/00 , C02F1/325 , C02F1/004 , C02F1/008 , C02F1/04 , C02F1/20 , C02F1/42 , C02F1/441 , C02F1/444 , C02F1/4693 , C02F1/4695 , C02F1/70 , C02F1/722 , C02F2001/427 , C02F2103/04 , C02F2103/346 , C02F2201/326 , C02F2201/3227 , C02F2209/20 , C02F2301/08 , C02F2303/18 , C02F2305/023
摘要： A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate a continuously variable intensity of the actinic radiation.
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公开(公告)号：US20210086138A1
公开(公告)日：2021-03-25
申请号：US16954517
申请日：2018-12-20
发明人： Michael Gullion , Christopher Hall , Joshua Hawley
摘要： A conditioning system for a filter module is disclosed. The conditioning system may generally include an inlet, a heat exchanger, a magnetically levitated pump, a channel provided to bypass the heat exchanger, a controller, an outlet, and a base. The system may have components lined with corrosion-resistant materials. A method of conditioning a filter module is also disclosed. The method may generally include measuring TOC in a source of ultrapure water, heating the ultrapure water, rinsing a filter module with the heated water, flushing the filter module with ambient temperature water, and repeating the rinsing with heated water and flushing with ambient temperature water. A method of facilitating conditioning of the filter module is also disclosed. The method may generally include providing a portable filter module conditioning system and providing instructions for installation or use.
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公开(公告)号：US20210380451A1
公开(公告)日：2021-12-09
申请号：US17199092
申请日：2021-03-11
摘要： A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate a continuously variable intensity of the actinic radiation.
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公开(公告)号：US20180273412A1
公开(公告)日：2018-09-27
申请号：US15571266
申请日：2016-05-04
IPC分类号： C02F9/00
CPC分类号： C02F9/00 , C02F1/004 , C02F1/008 , C02F1/04 , C02F1/20 , C02F1/325 , C02F1/42 , C02F1/441 , C02F1/444 , C02F1/4693 , C02F1/4695 , C02F1/70 , C02F1/722 , C02F2001/427 , C02F2103/04 , C02F2103/346 , C02F2201/3227 , C02F2201/326 , C02F2209/20 , C02F2301/08 , C02F2303/18 , C02F2305/023
摘要： A method and system of providing ultrapure water for semiconductor fabrication operations is provided. The water is treated by utilizing a free radical scavenging system. The free radical scavenging system can utilize actinic radiation with a free radical precursor compound, such as ammonium persulfate. The ultrapure water may be further treated by utilizing ion exchange media and degasification apparatus. A control system can be utilized to regulate a continuously variable intensity of the actinic radiation.
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公开(公告)号：US20180134592A1
公开(公告)日：2018-05-17
申请号：US15571860
申请日：2016-05-06
CPC分类号： C02F1/725 , C02F1/001 , C02F1/004 , C02F1/20 , C02F1/32 , C02F1/722 , C02F2101/34 , C02F2101/36 , C02F2101/38 , C02F2103/06 , C02F2305/10 , Y02A20/156
摘要： According to various aspects and embodiments, a system and method for treating groundwater contaminated with an organic contaminant is provided. According to some embodiments, the contaminated groundwater is treated by introducing a persulfate to produce a first treated aqueous solution, exposing the first treated aqueous solution to ultraviolet light to produce a second treated aqueous solution and one or more gases, and removing the one or more gases generated from exposing the first treated aqueous solution to the ultraviolet light.
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公开(公告)号：US11975294B2
公开(公告)日：2024-05-07
申请号：US16954517
申请日：2018-12-20
发明人： Michael Gullion , Christopher Hall , Joshua Hawley
IPC分类号： B01D65/02 , B01D61/14 , B01D61/20 , B01D61/22 , C02F1/44 , F28F19/02 , G01N15/06 , C02F103/04
CPC分类号： B01D65/02 , B01D61/146 , B01D61/20 , B01D61/22 , C02F1/444 , F28F19/02 , G01N15/06 , B01D2311/246 , B01D2313/221 , B01D2313/48 , B01D2313/903 , B01D2321/08 , B01D2321/40 , C02F2103/04 , C02F2209/105 , C02F2209/20 , C02F2209/40 , C02F2303/08 , C02F2303/16 , G01N2015/0662
摘要： A conditioning system for a filter module is disclosed. The conditioning system may generally include an inlet, a heat exchanger, a magnetically levitated pump, a channel provided to bypass the heat exchanger, a controller, an outlet, and a base. The system may have components lined with corrosion-resistant materials. A method of conditioning a filter module is also disclosed. The method may generally include measuring TOC in a source of ultrapure water, heating the ultrapure water, rinsing a filter module with the heated water, flushing the filter module with ambient temperature water, and repeating the rinsing with heated water and flushing with ambient temperature water. A method of facilitating conditioning of the filter module is also disclosed. The method may generally include providing a portable filter module conditioning system and providing instructions for installation or use.
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公开(公告)号：US10934193B2
公开(公告)日：2021-03-02
申请号：US15571860
申请日：2016-05-06
IPC分类号： C02F1/32 , C02F1/72 , C02F1/20 , C02F1/00 , C02F101/34 , C02F103/06 , C02F101/36 , C02F101/38
摘要： According to various aspects and embodiments, a system and method for treating groundwater contaminated with an organic contaminant is provided. According to some embodiments, the contaminated groundwater is treated by introducing a persulfate to produce a first treated aqueous solution, exposing the first treated aqueous solution to ultraviolet light to produce a second treated aqueous solution and one or more gases, and removing the one or more gases generated from exposing the first treated aqueous solution to the ultraviolet light.
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公开(公告)号：US20160207813A1
公开(公告)日：2016-07-21
申请号：US15002474
申请日：2016-01-21
CPC分类号： C02F9/00 , C02F1/004 , C02F1/008 , C02F1/04 , C02F1/325 , C02F1/42 , C02F1/441 , C02F1/4693 , C02F1/4695 , C02F1/72 , C02F2101/305 , C02F2101/34 , C02F2101/36 , C02F2103/06 , C02F2201/008 , C02F2201/3227 , C02F2201/326 , C02F2209/001 , C02F2209/20 , C02F2209/40 , C02F2209/44 , Y02A20/156
摘要： According to various aspects and embodiments, a system and method for treated contaminated groundwater is provided. The groundwater is contaminated with an initial concentration of recalcitrant organic contaminant. According to some embodiments, the contaminated groundwater is treated by introducing a persulfate to produce a first treated aqueous solution and then exposing the first treated aqueous solution to ultraviolet light to produce a second treated aqueous solution. The second treated aqueous solution may have a concentration of the recalcitrant organic contaminant that is at least 50% less than the initial concentration of recalcitrant organic contaminant.
摘要翻译： 根据各方面和实施例，提供了一种处理污染地下水的系统和方法。 地下水被初始浓度的顽固有机污染物污染。 根据一些实施方案，污染的地下水通过引入过硫酸盐来处理以产生第一处理的水溶液，然后将第一处理的水溶液暴露于紫外光以产生第二处理的水溶液。 第二次处理的水溶液可以具有比顽固有机污染物的初始浓度小至少50％的顽固有机污染物的浓度。
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