Invention Grant
- Patent Title: Articles coated with fluoro-annealed films
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Application No.: US14870981Application Date: 2015-09-30
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Publication No.: US10961617B2Publication Date: 2021-03-30
- Inventor: I-Kuan Lin , Nilesh Gunda , Dennis Radgowski , Chandra Venkatraman
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc.
- Main IPC: C23C14/48
- IPC: C23C14/48 ; C23C14/58 ; C23C14/08 ; H01J37/32
Abstract:
Articles and methods relating to coatings having superior plasma etch-resistance and which can prolong the life of RIE components are provided. An article has a vacuum compatible substrate and a protective film overlying at least a portion of the substrate. The film comprises a fluorinated metal oxide containing yttrium.
Public/Granted literature
- US20160273095A1 Articles Coated With Fluoro-Annealed Films Public/Granted day:2016-09-22
Information query
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