Invention Grant
- Patent Title: Semiconductor package and manufacturing method thereof
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Application No.: US16569673Application Date: 2019-09-13
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Publication No.: US10962711B2Publication Date: 2021-03-30
- Inventor: Chih-Chieh Chang , Chung-Hao Tsai , Chen-Hua Yu , Chuei-Tang Wang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: G02B6/12
- IPC: G02B6/12 ; G02B6/13

Abstract:
A semiconductor package and a manufacturing method thereof are provided. The semiconductor package includes a photonic die, an encapsulant and a wave guide structure. The photonic die includes a substrate and a dielectric layer. The substrate has a wave guide pattern. The dielectric layer is disposed over the substrate. The photonic die is encapsulated by the encapsulant. The wave guide structure spans over the front side of the photonic die and a top surface of the encapsulant, and penetrates the dielectric layer to be optically coupled with the wave guide pattern.
Public/Granted literature
- US20200174187A1 SEMICONDUCTOR PACKAGE AND MANUFACTURING METHOD THEREOF Public/Granted day:2020-06-04
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