Invention Grant
- Patent Title: Structures for acoustic wave overlay error determination using periodic structures
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Application No.: US15962518Application Date: 2018-04-25
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Publication No.: US10962888B2Publication Date: 2021-03-30
- Inventor: Yu-Ching Lee , Yu-Piao Fang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes and Boone, LLP
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G06T7/68 ; G06T7/00

Abstract:
A structure includes a first periodic structure positioned on a chip, the first periodic structure comprising a material of a first layer disposed on the chip. The structure further includes a second periodic structure positioned within the region of the chip adjacent the first periodic structure, the second periodic structure comprising a second material of a second layer disposed on the chip. The structure further includes an acoustic wave transmitter device disposed on the chip and an acoustic wave receiver device disposed on the chip.
Public/Granted literature
- US20190163076A1 Method and Structures for Acoustic Wave Overlay Error Determination Public/Granted day:2019-05-30
Information query
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