Invention Grant
- Patent Title: Semiconductor wafer storage system and method of supplying fluid for semiconductor wafer storage
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Application No.: US16529082Application Date: 2019-08-01
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Publication No.: US10964570B2Publication Date: 2021-03-30
- Inventor: Sangkyung Lee , Yong-Jun Ahn , Taijo Jeon , Kyubum Cho , Jongsam Kim , Gi-Nam Park , Chul-Jun Park , Junyong Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, PC
- Priority: KR10-2018-0153633 20181203,KR10-2019-0039788 20190404
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/67 ; B05B1/30

Abstract:
A semiconductor wafer storage system includes a container that provides a space in which a semiconductor wafer is to be stored, a fluid supply that provides a fluid to the container, a connection part that receives the fluid from the fluid supply and transfers the fluid to the container, and a nozzle part that connects the connection part to the container. The container may include a coupling plate to which the nozzle part is coupled, and the nozzle part may include a first nozzle and a second nozzle.
Public/Granted literature
- US20200176293A1 SEMICONDUCTOR WAFER STORAGE SYSTEM AND METHOD OF SUPPLYING FLUID FOR SEMICONDUCTOR WAFER STORAGE Public/Granted day:2020-06-04
Information query
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