Invention Grant
- Patent Title: Environmentally protected sensing device
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Application No.: US16378322Application Date: 2019-04-08
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Publication No.: US10964613B2Publication Date: 2021-03-30
- Inventor: Calin Miclaus
- Applicant: InvenSense, Inc.
- Applicant Address: US CA San Jose
- Assignee: InvenSense, Inc.
- Current Assignee: InvenSense, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L23/04 ; B81B7/00 ; H01L23/00 ; H01L25/18

Abstract:
A device includes a die comprising a sensor. The device also includes a substrate that is coupled to the die via the electrical coupling. The device further includes a packaging container. The packaging container and the substrate form a housing for the die. The packaging container comprises an opening that exposes at least a portion of the die to an environment external to the housing. The exposed surfaces of the die, interior of the housing, the electrical coupling, and the substrate to the environment external to the housing through the opening are coated with a conformal film. The conformal film prevents liquid, e.g., water, gas, etc., contact to the exposed surfaces of the die, the electrical coupling and the substrate.
Public/Granted literature
- US20190311961A1 ENVIRONMENTALLY PROTECTED SENSING DEVICE Public/Granted day:2019-10-10
Information query
IPC分类: