Invention Grant
- Patent Title: Laser device
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Application No.: US16266279Application Date: 2019-02-04
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Publication No.: US10965087B2Publication Date: 2021-03-30
- Inventor: Hirotaka Miyamoto , Osamu Wakabayashi
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/08
- IPC: H01S3/08 ; H01S3/03 ; H01S3/225 ; H01S3/0971 ; H01S3/106

Abstract:
Provided is a laser device that includes a laser chamber in which a pair of discharge electrodes are disposed; a line narrowing optical system including a grating disposed in a position outside the laser chamber; a beam expander optical system that increases a diameter of a light beam, outputted from the laser chamber and traveling toward the grating, in a first direction parallel to a discharge direction between the discharge electrodes and in a second direction orthogonal to the discharge direction; and a holding platform that is formed as a component separate from the laser chamber and the grating, holds the beam expander optical system, and forms along with the beam expander optical system a beam expander unit.
Public/Granted literature
- US20190173258A1 LASER DEVICE Public/Granted day:2019-06-06
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