Invention Grant
- Patent Title: Low particle protected flapper valve
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Application No.: US16341703Application Date: 2017-12-01
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Publication No.: US10969029B2Publication Date: 2021-04-06
- Inventor: Charles T. Carlson , Tammy Jo Pride , Benjamin B. Riordon , Aaron Webb
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- International Application: PCT/US2017/064320 WO 20171201
- International Announcement: WO2018/102757 WO 20180607
- Main IPC: F16K27/02
- IPC: F16K27/02 ; F16K1/20 ; F16K11/10 ; F16K1/22 ; H01L21/67

Abstract:
Embodiments of the disclosure generally relate to a flapper valve. The flapper valve may be used with processing chambers, such as semiconductor substrate processing chambers. In one embodiment, a flapper valve includes a housing having a first opening at a first end thereof and a second opening at a second end thereof, a first flapper pivotably disposed in the housing, and a second flapper pivotably disposed in the housing. The first and second flappers are movable to selectively open and close at least one of the first opening and the second opening.
Public/Granted literature
- US20190293199A1 LOW PARTICLE PROTECTED FLAPPER VALVE Public/Granted day:2019-09-26
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