Invention Grant
- Patent Title: Methods of forming NAND cell units
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Application No.: US16548003Application Date: 2019-08-22
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Publication No.: US10971607B2Publication Date: 2021-04-06
- Inventor: Yongjun Jeff Hu
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/28 ; H01L27/11521 ; H01L27/11524 ; H01L29/423 ; H01L29/792 ; H01L27/115 ; H01L27/1157

Abstract:
Some embodiments include methods of forming charge storage transistor gates and standard FET gates in which common processing is utilized for fabrication of at least some portions of the different types of gates. FET and charge storage transistor gate stacks may be formed. The gate stacks may each include a gate material, an insulative material, and a sacrificial material. The sacrificial material is removed from the FET and charge storage transistor gate stacks. The insulative material of the FET gate stacks is etched through. A conductive material is formed over the FET gate stacks and over the charge storage transistor gate stacks. The conductive material physically contacts the gate material of the FET gate stacks, and is separated from the gate material of the charge storage transistor gate stacks by the insulative material remaining in the charge storage transistor gate stacks. Some embodiments include gate structures.
Information query
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