Invention Grant
- Patent Title: Nano-structured non-polarizing beamsplitter
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Application No.: US16138092Application Date: 2018-09-21
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Publication No.: US10976562B2Publication Date: 2021-04-13
- Inventor: Dmitry Gorelik , Andrew V. Hill , Ohad Bachar , Amnon Manassen , Daria Negri
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G02B27/14
- IPC: G02B27/14 ; G02B27/10 ; G02B27/09

Abstract:
A beamsplitter includes a substrate formed from a material transparent to wavelengths of light at least above a selected cutoff wavelength and reflective structures distributed across a surface of the substrate. The reflective structures split incident light having wavelengths above the selected cutoff wavelength into a reflected beam formed from portions of the incident light reflected from the reflective structures and a transmitted beam formed from portions of the incident light transmitted through the substrate. A splitting ratio of a power of the reflected beam to a power of the transmitted beam is based on a ratio of surface area of the reflective surfaces to an area of the incident light on the substrate. Separation distances between neighboring reflective structures are smaller than the cutoff wavelength such that diffracted power of the incident light having wavelengths above the selected cutoff wavelength is maintained below a selected tolerance.
Public/Granted literature
- US20190107727A1 Nano-Structured Non-Polarizing Beamsplitter Public/Granted day:2019-04-11
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