Invention Grant
- Patent Title: Semiconductor device and method for manufacturing the same
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Application No.: US16112116Application Date: 2018-08-24
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Publication No.: US10978367B2Publication Date: 2021-04-13
- Inventor: Chiaki Kudou , Takashi Hasegawa , Kouichi Saitou
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JPJP2017-174480 20170912
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/31 ; H01L23/29 ; H01L29/16 ; H01L21/311 ; H01L29/872 ; H01L21/02 ; H01L29/78 ; H01L29/06

Abstract:
A semiconductor device according to an exemplary embodiment includes a semiconductor substrate, an interlayer insulating layer, at least one electrode, an inorganic protective layer, and an organic protective layer. The interlayer insulating layer is formed on the semiconductor substrate and has at least one opening. The at least one electrode has part formed on an edge of the at least one opening, and has other part electrically connected, in the at least one opening, to the semiconductor substrate. The inorganic protective layer includes an inner edge portion and an outer edge portion. The inner edge portion covers an edge of the at least one electrode. The inorganic protective layer, except for the inner edge portion, is formed on the interlayer insulating layer. The organic protective layer covers the inorganic protective layer. One of the inner edge portion and the outer edge portion of the inorganic protective layer has an undercut.
Public/Granted literature
- US20190080976A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2019-03-14
Information query
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