Invention Grant
- Patent Title: Mask plate for evaporation
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Application No.: US15840301Application Date: 2017-12-13
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Publication No.: US10982315B2Publication Date: 2021-04-20
- Inventor: Youwei Wang , Song Zhang , Tao Sun , Ping Song , Peng Cai , Yuanzheng Guo
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Dilworth & Barrese, LLP.
- Agent Michael J. Musella, Esq.
- Priority: CN201710428142.1 20170608
- Main IPC: C23C14/04
- IPC: C23C14/04 ; H01L51/00 ; H01L51/56 ; C23C14/12
Abstract:
A mask plate, a manufacturing method of the mask plate, and a method of evaporation by using the mask plate are provided. The mask plate includes an opening plate, the opening plate includes an opening and a blocking portion outside the opening, a concavity is in the blocking portion, and a depth of the concavity is smaller than a thickness of the blocking portion.
Public/Granted literature
- US20180355468A1 MASK PLATE, MANUFACTURING METHOD THEREOF AND METHOD OF EVAPORATION BY USING THE SAME Public/Granted day:2018-12-13
Information query
IPC分类:
