Invention Grant
- Patent Title: Sensor and adjuster for a consumable
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Application No.: US14934624Application Date: 2015-11-06
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Publication No.: US10985078B2Publication Date: 2021-04-20
- Inventor: Ian Kenworthy
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/683 ; H01L21/67 ; H01L21/687 ; G05B15/02 ; H01L21/3065 ; H01J37/32
Abstract:
An apparatus for use in a processing chamber is provided. A consumable is within the processing chamber. A scale is positioned to measure a mass of the consumable.
Public/Granted literature
- US20170133283A1 SENSOR AND ADJUSTER FOR A CONSUMABLE Public/Granted day:2017-05-11
Information query
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