Invention Grant
- Patent Title: Airborne molecular contamination filter cartridge system with combustible filter cartridge and reusable frame
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Application No.: US16097037Application Date: 2017-04-28
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Publication No.: US10987612B2Publication Date: 2021-04-27
- Inventor: Tom Leblanc , Joe Wildgoose , Marc Venet , Evan Warniers , John Gaudreau
- Applicant: ENTEGRIS, Inc.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, Inc.
- Current Assignee: ENTEGRIS, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc.
- International Application: PCT/US2017/030009 WO 20170428
- International Announcement: WO2017/189940 WO 20171102
- Main IPC: B01D46/00
- IPC: B01D46/00 ; B01D46/52 ; B01D27/06 ; B01D46/10 ; B01D27/08
Abstract:
Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support its end of service destruction.
Public/Granted literature
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