VALVE DEVICE
    1.
    发明公开
    VALVE DEVICE 审中-公开

    公开(公告)号:US20240350959A1

    公开(公告)日:2024-10-24

    申请号:US18721825

    申请日:2022-12-21

    摘要: A valve device includes a first member having a recess section where a first opening of a first flow channel opens; a second member having a protruding section having an end part formed with a second opening of a second flow channel, the protruding section being inserted into the recess section such that the first opening is opposed to the second opening; a filter having a thickness in a predetermined direction, located between the first opening and the second opening; and a retainer having a body part retaining the filter inside, and at least two attachment parts formed on one side of a predetermined direction of the body part and attached to the protruding section.

    LAUNDRY PROCESSING APPARATUS
    5.
    发明公开

    公开(公告)号:US20240247431A1

    公开(公告)日:2024-07-25

    申请号:US18624392

    申请日:2024-04-02

    摘要: A laundry processing apparatus includes a filter assembly that is detachably supported by a filter holder positioned between a processing module and a guide duct, and an inner filter and an outer filter that are overlappingly assembled with each other, and removes debris contained in circulated air and then supplies the circulated air into the guide duct. The filter holder is assembled with a sealing member, and the sealing member is provided to cover at least a part of an outer surface of the outer filter to seal a gap between the outer filter and the filter holder, and a part of the sealing member protrudes toward the inner filter to seal a gap between the inner filter and the outer filter.

    SEMICONDUCTOR WASTE GAS TREATMENT SYSTEM AND MOISTURE-GAS SEPARATOR OF THE SAME

    公开(公告)号:US20240198272A1

    公开(公告)日:2024-06-20

    申请号:US18512714

    申请日:2023-11-17

    摘要: Disclosed are a semiconductor waste gas treatment system and a moisture-gas separator of the same. A moisture-gas separator is communicated between a wet scrubber and an air extraction device in the semiconductor waste gas treatment system. An air inlet pipe, a separation pipe and an exhaust pipe are communicated with one another in the moisture-gas separator. A diversion inclined partition is disposed obliquely in the separation pipe and a filter material layer filled in the separation pipe of the moisture-gas separator. The wet scrubber washes a process waste gas from a process waste gas source and discharges a scrubbed waste gas. The air extraction device provides a suction force so that the scrubbed waste gas first enters the separation pipe through the air inlet pipe, and is separated into water mist and dust, and then a dry waste gas is discharged through the exhaust pipe.

    EFEM
    9.
    发明授权
    EFEM 有权

    公开(公告)号:US12002693B2

    公开(公告)日:2024-06-04

    申请号:US17959247

    申请日:2022-10-03

    IPC分类号: H01L21/67 B01D46/00 B01D46/10

    摘要: Particles in an accommodation chamber are also easily discharged while facilitating replacement of an atmosphere in the accommodation chamber with an inert gas. An EFEM includes a load port 4, a housing configured to define, in the housing, a transfer chamber closed by connecting the load port 4 to an opening provided in a partition wall, a supply pipe for supplying nitrogen to a transfer chamber, and a discharge pipe 49 for discharging a gas in the transfer chamber. The load port 4 includes an opening/closing mechanism 54 capable of opening and closing a lid 101 of a mounted FOUP 100, and an accommodation chamber 60 kept in communication with the transfer chamber via a slit 51b and configured to accommodate a part of the opening/closing mechanism 54. The discharge pipe 49 is connected to the accommodation chamber 60 to discharge the gas in the transfer chamber via the accommodation chamber 60.