公开(公告)号：US10987612B2

公开(公告)日：2021-04-27

申请号：US16097037

申请日：2017-04-28

Applicant: ENTEGRIS, Inc.

Inventor： Tom Leblanc ,  Joe Wildgoose ,  Marc Venet ,  Evan Warniers ,  John Gaudreau

IPC: B01D46/00 ,  B01D46/52 ,  B01D27/06 ,  B01D46/10 ,  B01D27/08

Abstract: Filters for semiconductor tool and clean room applications to control airborne molecular contamination. The filter cartridge system includes a filter cartridge having a non-woven fiber and at least one adsorbent. In some embodiments, the filter cartridge is constructed of substantially combustible materials to support its end of service destruction.