Invention Grant
- Patent Title: Semiconductor device having a plurality of fins and method of fabricating the same
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Application No.: US16840764Application Date: 2020-04-06
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Publication No.: US10991692B2Publication Date: 2021-04-27
- Inventor: Myoung Ho Kang , Gyeongseop Kim , Jeong Lim Kim , Jae Myoung Lee , Heung Suk Oh , Yeon Hwa Lim , Joong Won Jeon , Sung Min Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Onello & Mello, LLP
- Priority: KR10-2017-0043207 20170403
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/033 ; H01L21/8234 ; H01L21/308 ; H01L21/84 ; H01L27/12 ; H01L29/06 ; H01L29/417

Abstract:
A semiconductor device comprises a first fin-type pattern comprising a first long side extending in a first direction, and a first short side extending in a second direction. A second fin-type pattern is arranged substantially parallel to the first fin-type pattern. A first gate electrode intersects the first fin-type pattern and the second fin-type pattern. The second fin-type pattern comprises a protrusion portion that protrudes beyond the first short side of the first fin-type pattern. The first gate electrode overlaps with an end portion of the first fin-type pattern that comprises the first short side of the first fin-type pattern. At least part of a first sidewall of the first fin-type pattern that defines the first short side of the first fin-type pattern is defined by a first trench having a first depth. The first trench directly adjoins a second trench having a second, greater, depth.
Public/Granted literature
- US20200235097A1 SEMICONDUCTOR DEVICE HAVING FIRST AND SECOND FIN-TYPE PATTERNS AND METHOD OF FABRICATING THE SAME Public/Granted day:2020-07-23
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