- Patent Title: Method of producing solid-state imaging device having color filters, solid-state imaging device having color filters, method of producing color filter device comprising color filters, and color filter device comprising color filters
-
Application No.: US15977115Application Date: 2018-05-11
-
Publication No.: US10991736B2Publication Date: 2021-04-27
- Inventor: Satoshi Takahashi , Tomohiro Imoto
- Applicant: TOPPAN PRINTING CO., LTD.
- Applicant Address: JP Taito-ku
- Assignee: TOPPAN PRINTING CO., LTD.
- Current Assignee: TOPPAN PRINTING CO., LTD.
- Current Assignee Address: JP Taito-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2015-224016 20151116,JPJP2016-116498 20160610
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/3065 ; G02B5/20 ; H01L21/311

Abstract:
A method of producing a color filter includes applying, on a semiconductor substrate, a first color filter material including a first resin dispersion including a first pigment and a resin material, curing the first color filter material such that a first color filter film is formed and serves as a precursor of a first color filter including the first pigment, forming a photosensitive resin mask material layer on the first color filter film, forming openings by photolithography in portions of the photosensitive resin mask material layer such that second and subsequent color filters including pigments of colors different from the first pigment are to be formed in the openings, and that portions of the first color filter film are exposed by the openings, dry-etching the portions of the first color filter film by using a dry etching gas and the photosensitive resin mask material layer as an etching mask, removing the etching mask such that the first color filter is formed, and forming the second and subsequent color filters.
Public/Granted literature
Information query
IPC分类: