Invention Grant
- Patent Title: Semiconductor device and method for fabricating the same
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Application No.: US16166173Application Date: 2018-10-22
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Publication No.: US10991873B2Publication Date: 2021-04-27
- Inventor: Chen-Yi Weng , Jing-Yin Jhang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN201811044897.2 20180907
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/12 ; H01F10/32 ; H01F41/34 ; H01L23/528 ; H01L21/768 ; H01L27/22 ; H01L23/522 ; H01L43/10

Abstract:
A method for fabricating semiconductor device includes the steps of: forming a magnetic tunneling junction (MTJ) on a substrate; forming a liner on the MTJ; removing part of the liner to form a recess exposing the MTJ; and forming a conductive layer in the recess, wherein top surfaces of the conductive layer and the liner are coplanar. Preferably the MTJ further includes: a bottom electrode on the substrate, a fixed layer on the bottom electrode, and a top electrode on the fixed layer, in which the conductive layer and the top electrode are made of same material.
Public/Granted literature
- US20200083428A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2020-03-12
Information query
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