Invention Grant
- Patent Title: Polishing apparatus using neural network for monitoring
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Application No.: US15953203Application Date: 2018-04-13
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Publication No.: US10994389B2Publication Date: 2021-05-04
- Inventor: Kun Xu , Hassan G. Iravani , Denis Ivanov , Boguslaw A. Swedek , Shih-Haur Shen , Harry Q. Lee , Benjamin Cherian
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B37/013
- IPC: B24B37/013 ; H01L21/306 ; H01L21/66 ; G06N3/08 ; G06N3/04

Abstract:
A method of polishing a layer on the substrate at a polishing station includes the actions of monitoring the layer during polishing at the polishing station with an in-situ monitoring system to generate a plurality of measured signals for a plurality of different locations on the layer; generating, for each location of the plurality of different locations, an estimated measure of thickness of the location, the generating including processing the plurality of measured signals through a neural network; and at least one of detecting a polishing endpoint or modifying a polishing parameter based on each estimated measure of thickness.
Public/Granted literature
- US20180304435A1 POLISHING APPARATUS USING NEURAL NETWORK FOR MONITORING Public/Granted day:2018-10-25
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