Invention Grant
- Patent Title: Semiconductor devices comprising conductive patterns of varying dimensions and related systems
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Application No.: US16531837Application Date: 2019-08-05
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Publication No.: US10998224B2Publication Date: 2021-05-04
- Inventor: Scott L. Light , Richard J. Hill
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L21/768 ; H01L21/033 ; H01L23/522 ; H01L23/528

Abstract:
A metal pattern comprising interconnected small metal segments, medium metal segments, and large metal segments. At least one of the small metal segments comprises a pitch of less than about 45 nm and the small metal segments, medium metal segments, and large metal segments are separated from one another by variable spacing. Semiconductor devices comprising initial metallizations, systems comprising the metal pattern, and methods of forming a pattern are also disclosed.
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