Invention Grant
- Patent Title: High-power ultraviolet (UV) and vacuum ultraviolet (VUV) lamps with micro-cavity plasma arrays
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Application No.: US16850058Application Date: 2020-04-16
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Publication No.: US11004673B2Publication Date: 2021-05-11
- Inventor: Sung-Jin Park , Cyrus M. Herring , James Gary Eden
- Applicant: Eden Park Illumination
- Applicant Address: US IL Champaign
- Assignee: Eden Park Illumination
- Current Assignee: Eden Park Illumination
- Current Assignee Address: US IL Champaign
- Agency: Dickinson Wright PLLC
- Main IPC: H01J61/30
- IPC: H01J61/30 ; A61L2/10 ; C02F1/32 ; H01J9/26 ; H01J61/16 ; H01J9/24 ; H01J11/12 ; H01J11/36 ; H01J65/04 ; H01J11/38 ; H01J11/18 ; A61L2/26 ; F02M25/12 ; H01J9/39 ; H01J61/02 ; H01J61/12 ; H01J61/42

Abstract:
A product having at least one plasma lamp that includes plates that are approximately parallel, with at least one array of microcavities formed in a surface of at least one plate. When desirable, the plates are separated a fixed distance by spacers with at least one spacer being placed near the plate's edge to form a hermetic seal therewith. A gas makes contact with the microcavity array. Electrodes capable of delivering a time-varying voltage are located such that the application of the time-varying voltage interacts with the gas to form a glow discharge plasma in the microcavities and the fixed volume between the plates. The glow discharge plasma efficiently and uniformly emits radiation that is predominantly in the UV/VUV spectral range with at least a portion of the radiation being emitted from the plasma lamp.
Public/Granted literature
- US20200251324A1 HIGH-POWER ULTRAVIOLET (UV) AND VACUUM ULTRAVIOLET (VUV) LAMPS WITH MICRO-CAVITY PLASMA ARRAYS Public/Granted day:2020-08-06
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