Invention Grant
- Patent Title: Thin-film transistor having hydrogen-blocking layer and display apparatus including the same
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Application No.: US16058737Application Date: 2018-08-08
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Publication No.: US11011650B2Publication Date: 2021-05-18
- Inventor: Seoyeon Im , HeeSung Lee , SeungJin Kim , SungKi Kim
- Applicant: LG Display Co., Ltd.
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Polsinelli PC
- Priority: KR10-2017-0148778 20171109
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/24 ; H01L21/385 ; H01L27/12 ; H01L29/66 ; H01L21/02 ; H01L29/04 ; H01L51/00 ; H01L27/32 ; G02F1/1368 ; G02F1/1362

Abstract:
A thin-film transistor is disclosed. The thin-film transistor includes an oxide semiconductor layer disposed on a substrate, a gate electrode disposed so as to overlap at least a portion of the oxide semiconductor layer and isolated from the oxide semiconductor layer, a source electrode connected to the oxide semiconductor layer, and a drain electrode connected to the oxide semiconductor layer and spaced apart from the source electrode, wherein the oxide semiconductor layer includes a first sub layer disposed on the substrate, a second sub layer disposed on the first sub layer, and a third sub layer disposed on the second sub layer, the second sub layer has larger resistance than the first sub layer and the third sub layer and lower carrier concentration than the first sub layer and the third sub layer, the first sub layer has higher hydrogen concentration than the second sub layer and the third sub layer, and each of the first sub layer and the second sub layer has crystallinity.
Public/Granted literature
- US20190140101A1 THIN-FILM TRANSISTOR HAVING HYDROGEN-BLOCKING LAYER AND DISPLAY APPARATUS INCLUDING THE SAME Public/Granted day:2019-05-09
Information query
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