Invention Grant
- Patent Title: Crack sensor for sensing cracks in a solder pad, and method for production quality control
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Application No.: US16210149Application Date: 2018-12-05
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Publication No.: US11018096B2Publication Date: 2021-05-25
- Inventor: Eric Sabouret , Krysten Rochereau , Olivier Hinsinger , Flore Persin-Crelerot
- Applicant: STMicroelectronics (Crolles 2) SAS , STMicroelectronics (Grenoble 2) SAS
- Applicant Address: FR Crolles; FR Grenoble
- Assignee: STMicroelectronics (Crolles 2) SAS,STMicroelectronics (Grenoble 2) SAS
- Current Assignee: STMicroelectronics (Crolles 2) SAS,STMicroelectronics (Grenoble 2) SAS
- Current Assignee Address: FR Crolles; FR Grenoble
- Agency: Crowe & Dunlevy
- Priority: FR1761685 20171206
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L23/00 ; H05K3/34 ; H01L23/498

Abstract:
An integrated circuit includes a solder pad which includes, in a superposition of metallization levels, an underlying structure formed by a network of first regular metal tracks that are arranged for reinforcing the mechanical strength of the underlying structure and electrically connecting between an upper metallization level and a lower metallization level of the underlying structure. The underlying structure further includes a detection electrical path formed by second metal tracks passing between the first metal tracks in the metallization levels, the detection electrical path having an input terminal and an output terminal. Electrical sensing of the detection electrical path is made to supply a measurement which is indicative of the presence of cracks in the underlying structure.
Public/Granted literature
- US20190172795A1 CRACK SENSOR FOR SENSING CRACKS IN A SOLDER PAD, AND METHOD FOR PRODUCTION QUALITY CONTROL Public/Granted day:2019-06-06
Information query
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