Invention Grant
- Patent Title: Three-dimensional memory device containing alternating stack of source layers and drain layers and vertical gate electrodes
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Application No.: US16539103Application Date: 2019-08-13
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Publication No.: US11018153B2Publication Date: 2021-05-25
- Inventor: James Kai , Johann Alsmeier , Murshed Chowdhury
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L29/417 ; H01L27/11597 ; H01L29/10

Abstract:
A three-dimensional memory device includes an alternating stack of source layers and drain layers located over a substrate, gate electrodes vertically extending through each of the source layers and the drain layers of the alternating stack, memory films laterally surrounding a respective one of the gate electrodes, and semiconductor channels laterally surrounding a respective one of the memory films and connected to a respective vertically neighboring pair of a source layer and a drain layer. An array of memory openings can vertically extend through the alternating stack, and each of the gate electrodes can be located within a respective one of the memory openings.
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