Invention Grant
- Patent Title: Phase change memory structures
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Application No.: US16619040Application Date: 2017-07-01
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Publication No.: US11018298B2Publication Date: 2021-05-25
- Inventor: Christopher W. Petz , David R. Economy
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Alliance IP, LLC
- International Application: PCT/US2017/040555 WO 20170701
- International Announcement: WO2019/009876 WO 20190110
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A phase change memory structure (100) includes a phase change material layer (110), a top electrode layer (120) above the phase change material layer, a metal silicon nitride layer (130) in contact with the top electrode layer opposite from the phase change material layer, a metal silicide layer (140) in contact with the metal silicon nitride layer opposite from the top electrode layer, and a conductive metal bit line (150) in contact with the metal silicide layer opposite from the metal silicon nitride layer.
Information query
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