Invention Grant
- Patent Title: Microfluidic device and method using double anodic bonding
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Application No.: US15841171Application Date: 2017-12-13
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Publication No.: US11021785B2Publication Date: 2021-06-01
- Inventor: Stephen Forrest , Gregory McGraw , Siddharth Harikrishna Mohan , Diane L. Peters
- Applicant: The Regents of the University of Michigan , Universal Display Corporation
- Applicant Address: US MI Ann Arbor; US NJ Ewing
- Assignee: The Regents of the University of Michigan,Universal Display Corporation
- Current Assignee: The Regents of the University of Michigan,Universal Display Corporation
- Current Assignee Address: US MI Ann Arbor; US NJ Ewing
- Agency: Reising Ethington P.C.
- Main IPC: C23C14/12
- IPC: C23C14/12 ; C23C14/22 ; C23C14/24
Abstract:
A microfluidic device for use with a microfluidic delivery system, such as an organic vapor jet printing device, includes a glass layer that is directly bonded to a microfabricated die and a metal plate via a double anodic bond. The double anodic bond is formed by forming a first anodic bond at an interface of the microfabricated die and the glass layer, and forming a second anodic bond at an interface of the metal plate and the glass layer, where the second anodic bond is formed using a voltage that is lower than the voltage used to form the first anodic bond. The second anodic bond is formed with the polarity of the voltage reversed with respect to the glass layer and the formation of the first anodic bond. The metal plate includes attachment features that allow removal of the microfluidic device from a fixture.
Public/Granted literature
- US20180105923A1 MICROFLUIDIC DEVICE AND METHOD USING DOUBLE ANODIC BONDING Public/Granted day:2018-04-19
Information query
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