Invention Grant
- Patent Title: Microwave output device and plasma processing device
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Application No.: US16491012Application Date: 2018-05-02
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Publication No.: US11031213B2Publication Date: 2021-06-08
- Inventor: Kazushi Kaneko , Yuji Onuma
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JPJP2017-094135 20170510
- International Application: PCT/JP2018/017543 WO 20180502
- International Announcement: WO2018/207705 WO 20181115
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/66

Abstract:
A device includes a microwave generation unit that averages the first measured values and the second measured values at a predetermined movement average time and a predetermined sampling interval, and controls the microwave such that a value obtained by subtracting the averaged second measured value from the averaged first measured value comes close to the setting power, and in which the predetermined movement average time is 60 μs or less, and a relationship of y≥78.178x0.1775 is satisfied when the predetermined sampling interval is indicated by x, and the predetermined movement average time is indicated by y.
Public/Granted literature
- US20200013587A1 MICROWAVE OUTPUT DEVICE AND PLASMA PROCESSING DEVICE Public/Granted day:2020-01-09
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